DUV laser for mask inspection apparatus: CYGNUS series

The world’s shortest-wavelength light source for practical applications (wavelength, 199 nm) was realized by mixing wavelength-converted beams (266 and 782 nm) with the fiber laser used as the base.

DUV laser for mask inspection apparatus: CYGNUS series

出力安定性(出力制御なし)
出力安定性(出力制御なし)

ビームプロファイル
ビームプロファイル

198.5nm発生スキーム
198.5nm発生スキーム

The world’s shortest-wavelength light source for practical applications (wavelength, 199 nm) was realized by mixing wavelength-converted beams (266 and 782 nm) with the fiber laser used as the base.

Main Features

  • Marked reduction in running cost with low power consumption (~800 W)
  • Operating output of 100 mW that ensures sufficient throughput
  • Narrow spectral width that enables suppression of the chromatic aberration of the inspection apparatus
  • High-quality beam
  • Efficient and stable conversion to short-wavelength using solid nonlinear crystals

    Application to inspection apparatus

  • One-year maintenance-free operation due to the long lifetime of ultraviolet optical elements (with an automatic output recovery function)
  • 24-hour operation, requiring one-hour automatic adjustment every one or two weeks
  • Short downtime ≤4% (actual)
  • Low operation cost

仕様

Wavelength(*1) 198.5nm
Linewidth < 5pm (FWHM)
Frequency(*2) > 1MHz
Output power Maximum/300mW, operation power/100mW
Pulse width(*3) 1ns
Beam size(*4) 〜φ3.0 mm
( @3m from exit end)
Beam quality M2 < 1.6
Polarization(*5)) Linear
Laser size(*6) 700(W)mm x 2100(L) mm x 1600(H)mm

Notes

  • *1: Wavelength is changeable. The wavelength of the laser depends on that of a seed laser.
  • *2: The pulse repetition rate is changeable.
  • *3: The pulse width is adjustable.
  • *4: The beam size is adjustable.
  • *5: Both vertical and horizontal polarizations are possible.
  • *6: The laser head is large owing to a built-in power source and other elements, because its use at semiconductor plants is assumed. If the power source is removed, the size of the laser head can be reduced to less than one-half.